Obtaining of gallium nitride thin films
Loading...
Date
Authors
Urazbayev, A.
Bolat, R.
Sabitova, A.
Tikhonov, A.
Journal Title
Journal ISSN
Volume Title
Publisher
Nazarbayev University
Abstract
The project executed by a joint team of the Nazarbayev University, Kazakhstan, Lawrence Berkeley
National Laboratory, Berkeley, California. The project will start by developing the HiPIMS technology
for GaN in an existing and upgraded vacuum chamber at partner laboratory (LBNL). This includes the
design and modification of magnetrons for sputtering from liquid gallium target. In a parallel effort,
components for a second deposition system will be purchased and a custom system will be developed
for deployment at Astana.