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Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LiPON)

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dc.contributor.author Uzakbaiuly, Berik
dc.contributor.author Bakenov, Zhumabay
dc.date.accessioned 2018-09-05T09:56:54Z
dc.date.available 2018-09-05T09:56:54Z
dc.date.issued 2018-08-08
dc.identifier.citation Uzakbaiuly, Berik, Bakenov, Zhumabay. (2018) Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LiPON). The 6th International Conference on Nanomaterials and Advanced Energy Storage Systems. Institute of Batteries LLP, Nazarbayev University, and PI “National Laboratory Astana”. p54. en_US
dc.identifier.uri http://nur.nu.edu.kz/handle/123456789/3472
dc.description.abstract Thin film of lithium phosphorus oxynitride (Lipon) was successfully deposited by radio frequency (RF) magnetron sputtering technique from Li3PO4 target. The power on the target was 150 W and optimal deposition pressure of N2/Ar = ~3/1 was of 2 mTorr. Analysis of the film was done by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both triply, Nt, and doubly, Nd, coordinated form. The impedance spectroscopy measurements was carried out and revealed the ionic conductivity of the sample to be 8.6 × 10 − 8 S cm-1 for optimum RF power and gas flow conditions. The electrochemical properties investigations and further development of this work will be presented at the Meeting. en_US
dc.language.iso en en_US
dc.publisher The 6th International Conference on Nanomaterials and Advanced Energy Storage Systems. Institute of Batteries LLP, Nazarbayev University, and PI “National Laboratory Astana”. en_US
dc.rights Attribution-NonCommercial-ShareAlike 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-sa/3.0/us/ *
dc.subject lithium phosphorus oxynitride (Lipon) en_US
dc.title Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LiPON) en_US
dc.type Abstract en_US
workflow.import.source science


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