Uzakbaiuly, Berik; Bakenov, Zhumabay
(The 6th International Conference on Nanomaterials and Advanced Energy Storage Systems. Institute of Batteries LLP, Nazarbayev University, and PI “National Laboratory Astana”., 2018-08-08)
Thin film of lithium phosphorus oxynitride (Lipon) was successfully deposited by radio frequency (RF) magnetron sputtering technique from Li3PO4 target. The power on the target was 150 W and optimal deposition pressure of ...