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Browsing Abstracts by Author "a92582f2-8409-424c-ae90-596e0ff422c7"

Browsing Abstracts by Author "a92582f2-8409-424c-ae90-596e0ff422c7"

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  • Experimental study of energy distribution in ion-beam lithography 
    Myrzabekova, M. M.; Guseinov, N.R.; Muratov, M.M.; Gabdullin, M.T.; Nemkayeva, R. R.; Tolkynbayeva, T.; Shabelnikova, Ya. L.; Zaitsev, S. I. (The 6th International Conference on Nanomaterials and Advanced Energy Storage Systems. Institute of Batteries LLP, Nazarbayev University, and PI “National Laboratory Astana”., 2018-08-08)
    The paper reports two important results. Conducted a rigorous comparison of the sensitivity of the resist is polymethylmethacrylate (PMMA) to the irradiation of electron and ion beams. It is shown that, as in the case of ...