Browsing Conference papers by Subject "preferential sputtering"

Now showing items 1-1 of 1

Radiation-induced synergistic effects of athermal and thermal mechanisms on erosion and surface evolution of advanced electrode and condenser optics materials

Allain, J. P.; Hassanein, A.; Burtseva, T.; Yacout, A.; Insepov, Z.; Taj, S.; Rice, B. J. (Proceedings of SPIE, 2004-02)

In extreme ultraviolet lithography (EUVL) environments transient plasma dynamics dictate conditions for particle/surface interactions. A critical challenge facing EUVL development is optic component lifetime both in ...