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Browsing Materials of conferences and seminars by Subject "lithium phosphorus oxynitride (Lipon)"

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Browsing Materials of conferences and seminars by Subject "lithium phosphorus oxynitride (Lipon)"

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  • Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LiPON) 
    Uzakbaiuly, Berik; Bakenov, Zhumabay (The 6th International Conference on Nanomaterials and Advanced Energy Storage Systems. Institute of Batteries LLP, Nazarbayev University, and PI “National Laboratory Astana”., 2018-08-08)
    Thin film of lithium phosphorus oxynitride (Lipon) was successfully deposited by radio frequency (RF) magnetron sputtering technique from Li3PO4 target. The power on the target was 150 W and optimal deposition pressure of ...