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Browsing 02.National Laboratory Astana by Author "Zeke, Insepov"

Browsing 02.National Laboratory Astana by Author "Zeke, Insepov"

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  • Atomic layer deposition for TiO2 and TiN nanometer films 
    Ainabayev, Ardak; Bozheyev, Farabi; Zhuldassov, Abat; Lukasheva, Maria; Tynyshtykbaev, Kurbangali B.; Insepov, Z. (Materials Today: Proceedings, 2017-01-01)
    Abstract In this work processes of atomic layer deposition (ALD) of TiO2 and TiN using ALD method and impact of thickness and composition of grown film on stoichiometry and morphology of deposited layer are investigated. ...