Development of hard and wear-resistant density modulated coatings by magnetron sputtering
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Date
Authors
Bolat, R.
Utegulov, Z.N.
Yakupov, T.
Taha, D.
Karabacak, T.
Journal Title
Journal ISSN
Volume Title
Publisher
Nazarbayev University
Abstract
The major task of our project is to develop a density modulated tungsten-based films to achieve high adherence of the entire hard sandwiched film structure to the substrate.