Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

Abstract

Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd , and possibly triply, Nt, coordinated form. The ac impedance spectroscopy measurements revealed that the highest ionic conductivity of 1.1 µScm-1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.