Numerical modeling of a low partial pressure water source for vacuum process

Abstract

The presence of hard-to-remove water in the vacuum systems of research facilities or process lines is a problem in most cases. The ability of water to be easily absorbed and poorly desorbed by the surface of metal elements leads to the need for a long pump-down every time it opens to the atmosphere. It is necessary to get rid of water from the elements of the system by a thorough bake-up at temperatures of 400-500 K to achieve an ultrahigh vacuum [1-2].