Elastic and structural properties of nanometer scale-thick refractory metal films

Simple item page
dc.contributor.authorYakupov, Talgat A.
dc.contributor.authorUtegulov, Zhandos N.
dc.contributor.authorDemirkan, Taha
dc.contributor.authorKarabacak, Tansel
dc.creatorTalgat A., Yakupov
dc.date.accessioned2017-12-20T09:02:29Z
dc.date.available2017-12-20T09:02:29Z
dc.date.issued2017-01-01
dc.description.abstractAbstract In this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic properties of studied hard thin coatings are measured by non-destructive nanosecond laser pulse induced surface acoustic wave technique, while their structural and dimensional properties are analysed using X-ray diffraction (XRD) and scanning electron microscopy, respectively. It was found that the Young’s modulus of these films increase with their nanoscale thickness. Young’s modulus of hard metals (W, Mo) was consistently higher than those of their bulk. However, the modulus of Ta films was higher than that of the corresponding bulk metal except for the film with the lowest thickness (22 nm). XRD analysis revealed that all films are under compressive stress, but this stress is diminished in thicker films.en_US
dc.identifierDOI:10.1016/j.matpr.2017.04.019
dc.identifier.citationTalgat A. Yakupov, Zhandos N. Utegulov, Taha Demirkan, Tansel Karabacak, Elastic and structural properties of nanometer scale-thick refractory metal films, In Materials Today: Proceedings, Volume 4, Issue 3, Part A, 2017, Pages 4469-4476en_US
dc.identifier.issn22147853
dc.identifier.urihttps://www.sciencedirect.com/science/article/pii/S2214785317305680
dc.identifier.urihttp://nur.nu.edu.kz/handle/123456789/2965
dc.language.isoenen_US
dc.publisherMaterials Today: Proceedingsen_US
dc.relation.ispartofMaterials Today: Proceedings
dc.rights.license© 2017 Elsevier Ltd. All rights reserved.
dc.subjectThin filmsen_US
dc.subjectrefractory metalsen_US
dc.subjectelastic propertiesen_US
dc.subjectcrystal structureen_US
dc.titleElastic and structural properties of nanometer scale-thick refractory metal filmsen_US
dc.typeArticleen_US
elsevier.aggregationtypeJournal
elsevier.coverdate2017-01-01
elsevier.coverdisplaydate2017
elsevier.endingpage4476
elsevier.identifier.doi10.1016/j.matpr.2017.04.019
elsevier.identifier.eid1-s2.0-S2214785317305680
elsevier.identifier.piiS2214-7853(17)30568-0
elsevier.identifier.scopusid85020909251
elsevier.issue.identifier3
elsevier.issue.name4th International Conference on Nanomaterials and Advanced Energy Storage Systems (INESS 2016), August 11-13, 2016, Almaty, Kazakhstan
elsevier.openaccess0
elsevier.openaccessarticlefalse
elsevier.openarchivearticlefalse
elsevier.startingpage4469
elsevier.teaserIn this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic...
elsevier.volume4
workflow.import.sourcescience

Files

Collections

Articles