Elastic and structural properties of sputtered refractory metal thin films

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dc.contributor.authorYakupov, T.
dc.contributor.authorUtegulov, Z. N.
dc.contributor.authorDemirkan, T.
dc.contributor.authorKarabacak, T.
dc.date.accessioned2015-11-03T11:02:13Z
dc.date.available2015-11-03T11:02:13Z
dc.date.issued2014
dc.description.abstractTo fabricate optimal hard and wear-resistant coatings it is necessary to tailor their mechanical and structural properties for an optimal industrial application. We are exploring elastic and structural properties of refractory metal (Ta, Nb, Mo and W) thin films of different thicknesses fabricated by DC magnetron spattering technique on single crystalline Si substrates.ru_RU
dc.identifier.isbn9786018046728
dc.identifier.urihttp://nur.nu.edu.kz/handle/123456789/713
dc.language.isoenru_RU
dc.publisherNazarbayev Universityru_RU
dc.subjectelasticru_RU
dc.subjectstructural propertiesru_RU
dc.subjectmetalru_RU
dc.titleElastic and structural properties of sputtered refractory metal thin filmsru_RU
dc.typeAbstractru_RU

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