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ПросмотрSchool of Engineering and Digital Sciences по теме "atomic layer deposition"

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FABRICATION AND INTEGRATION OF ONE- AND TWO-DIMENSIONAL MATERIALS FOR ADVANCED NANOSCALE DEVICES

Kemelbay, Aidar (Nazarbayev University School of Engineering and Digital Sciences, 2020-04)

As the miniaturization of electronic circuits reach physical limits, new materials and physical phenomenon need to be exploited to further increase device density and efficiency. A number of approaches have been proposed. ...