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Browsing School of Engineering and Digital Sciences by Author "ee12fbc5-5bbd-4337-842d-3a8af67ba182"
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Uzakbaiuly, Berik; Mukanova, Aliya; Zhang, Yongguang; Bakenov, Zhumabay
(Frontiers Media S.A., 2021-05-28)
With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. Physical vapor deposition (PVD) by means of thermal ...