Elastic and structural properties of sputtered refractory metal thin films

dc.contributor.author	Yakupov, T.
dc.contributor.author	Utegulov, Z. N.
dc.contributor.author	Demirkan, T.
dc.contributor.author	Karabacak, T.
dc.date.accessioned	2015-11-03T11:02:13Z
dc.date.available	2015-11-03T11:02:13Z
dc.date.issued	2014
dc.identifier.isbn	9786018046728
dc.identifier.uri	http://nur.nu.edu.kz/handle/123456789/713
dc.description.abstract	To fabricate optimal hard and wear-resistant coatings it is necessary to tailor their mechanical and structural properties for an optimal industrial application. We are exploring elastic and structural properties of refractory metal (Ta, Nb, Mo and W) thin films of different thicknesses fabricated by DC magnetron spattering technique on single crystalline Si substrates.	ru_RU
dc.language.iso	en	ru_RU
dc.publisher	Nazarbayev University	ru_RU
dc.subject	elastic	ru_RU
dc.subject	structural properties	ru_RU
dc.subject	metal	ru_RU
dc.title	Elastic and structural properties of sputtered refractory metal thin films	ru_RU
dc.type	Abstract	ru_RU