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Computer simulation of decaborane implantation and rapid thermal annealing

Insepov, Z.; Aoki, T.; Matsuo, J.; Yamada, I. (IEEE. Ion Implantation Technology Proceedings, 1998 International Conference, 1999-12)

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Author
- Aoki, T. (1)
- Insepov, Z. (1)
- Matsuo, J. (1)
- Yamada, I. (1)
Subject
- computer simulation (1)
- decaborane implantation (1)
- Molecular Dynamics (MD) (1)
- rapid thermal annealing (RTA) (1)
- ... View More
Date Issued
- 1999 (1)

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