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Browsing by Subject "Silicon layer"

Browsing by Subject "Silicon layer"

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  • Atomic layer deposition for TiO2 and TiN nanometer films 
    Ainabayev, Ardak; Bozheyev, Farabi; Zhuldassov, Abat; Lukasheva, Maria; Tynyshtykbaev, Kurbangali B.; Insepov, Z. (Materials Today: Proceedings, 2017-01-01)
    Abstract In this work processes of atomic layer deposition (ALD) of TiO2 and TiN using ALD method and impact of thickness and composition of grown film on stoichiometry and morphology of deposited layer are investigated. ...