Browsing by Author "549bf772-08d1-480a-928e-4e9c7b9ff970"

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Etching the surface of aluminum foil using high-frequency plasma to produce a nanoporous aluminum oxide membrane

Amirbekova, G.S.; Alpysbayeva, B.E.; Erlanuly, E.; Gabdullin, M. T.; Smirnov, V.Y. (The 8th International Conference on Nanomaterials and Advanced Energy Storage Systems; Nazarbayev University; National Laboratory Astana; Institute of Batteries, 2020-08)

In recent years, the trend of creating and improving sensitive sensors has taken an important place in the field of medicine, environmental monitoring and research of biomolecular interactions. In addition, these nanoporous ...
Experimental study of energy distribution in ion-beam lithography

Myrzabekova, M. M.; Guseinov, N.R.; Muratov, M.M.; Gabdullin, M.T.; Nemkayeva, R. R.; Tolkynbayeva, T.; Shabelnikova, Ya. L.; Zaitsev, S. I. (The 6th International Conference on Nanomaterials and Advanced Energy Storage Systems. Institute of Batteries LLP, Nazarbayev University, and PI “National Laboratory Astana”., 2018-08-08)

The paper reports two important results. Conducted a rigorous comparison of the sensitivity of the resist is polymethylmethacrylate (PMMA) to the irradiation of electron and ion beams. It is shown that, as in the case of ...