Understanding the breakdown voltage process in vacuum, specifically technology of
breakdown mitigation, is important for applications such as accelerators and thermonuclear synthesis. In
our work, we present simulation results and our conclusions about crater formation on a material surface
due to vacuum arc and plasma heating. Atomic layer deposition (ALD) and irradiation by gas cluster ion
beam (GCIB) can be applied to smoothen electrode surfaces; thus reducing the risks of a breakdown.