Mukanova, AliyaMukhan, OrynbassarMyronov, MaksymBakenov, Zhumabay2020-11-042020-11-042020-08http://nur.nu.edu.kz/handle/123456789/5057The miniaturization of the devices requires the miniaturization of energy storage systems. Lithium-ion batteries can provide the highest energy at smaller size and ligher weight among other energy systems. The present work reports the study of the development of new types of anodes – carbon film deposited on SiC thin film and Si thin film on SiC produced by chemical vapor deposition (CVD) method. The SiO2/MgF2/Al/Ti omics contacts were deposited by magnetron sputtering and annealed at 600 OC and served as the anode current collectors. The studies were accompanied by microscopic investigation and structural characterization.The the electrochemical results and characterization details will be detailed at the conference.enAttribution-NonCommercial-ShareAlike 3.0 United Statesminiaturization of energy storage systemslithium-ion batteriesResearch Subject Categories::TECHNOLOGYC-SiC and Si-SiC thin film systems as the anodes for LIBsAbstract