Browsing Conference papers by Subject "rapid thermal annealing (RTA)"

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Computer simulation of decaborane implantation and rapid thermal annealing

Insepov, Z.; Aoki, T.; Matsuo, J.; Yamada, I. (IEEE. Ion Implantation Technology Proceedings, 1998 International Conference, 1999-12)

Molecular Dynamics (MD) and Metropolis Monte- Carlo (MMC) models of monomer B and decaborane implantation into Si and following rapid thermal annealing (RTA) processes have been developed. The implanted B dopant and Si-atomic ...