DSpace Repository

Browsing Conference papers by Subject "rapid thermal annealing (RTA)"

Browsing Conference papers by Subject "rapid thermal annealing (RTA)"

Sort by: Order: Results:

  • Insepov, Z.; Aoki, T.; Matsuo, J.; Yamada, I. (IEEE. Ion Implantation Technology Proceedings, 1998 International Conference, 1999-12)
    Molecular Dynamics (MD) and Metropolis Monte- Carlo (MMC) models of monomer B and decaborane implantation into Si and following rapid thermal annealing (RTA) processes have been developed. The implanted B dopant and Si-atomic ...

Video Guide

Submission guideSubmission guide

Submit your materials for publication to

NU Repository Drive

Browse

My Account