Insepov, Z.; Aoki, T.; Matsuo, J.; Yamada, I.
(IEEE. Ion Implantation Technology Proceedings, 1998 International Conference, 1999-12)
Molecular Dynamics (MD) and Metropolis Monte- Carlo (MMC) models of monomer B and decaborane implantation into Si and following rapid thermal annealing (RTA) processes have been developed. The implanted B dopant and Si-atomic ...