Browsing Conference papers by Author "Aoki, T."

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Computer simulation of decaborane implantation and rapid thermal annealing

Insepov, Z.; Aoki, T.; Matsuo, J.; Yamada, I. (IEEE. Ion Implantation Technology Proceedings, 1998 International Conference, 1999-12)

Molecular Dynamics (MD) and Metropolis Monte- Carlo (MMC) models of monomer B and decaborane implantation into Si and following rapid thermal annealing (RTA) processes have been developed. The implanted B dopant and Si-atomic ...
Molecular dynamics study of implant and damage formation in low-energy boron cluster ion implantation

Aoki, T.; Matsuo, J.; Insepov, Z.; Yamada, I. (Ion Implantation Technology Proceedings, 1998 …, 1999, 1999)

Cluster ion implantation using decaborane (B,J-I,,) has been proposed as a useful technique for shallow junction formation. In order to examine the characteristics and advantages of cluster ion implantation, molecular ...