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Study of Peeling of Single Crystal Silicon by Intense Pulsed Ion Beam

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dc.contributor.author Yu, Xiao
dc.contributor.author Shen, Jie
dc.contributor.author Zhang, Jie
dc.contributor.author Zhong, Haowen
dc.contributor.author Cui, Xiaojun
dc.contributor.author Liang, Guoying
dc.contributor.author Yan, Sha
dc.contributor.author Zhang, Gaolong
dc.contributor.author Zhang, Xiaofu
dc.contributor.author Le, Xiaoyun
dc.date.accessioned 2016-11-04T03:28:06Z
dc.date.available 2016-11-04T03:28:06Z
dc.date.issued 2016-07-18
dc.identifier.citation Yu Xiao., Shen Jie., Zhang Jie., Zhong Haowen., Cui Xiaojun., Liang Guoying., Yan Sha., Zhang Gaolong., Zhang Xiaofu., Le Xiaoyun., (2016) Study of Peeling of Single Crystal Silicon by Intense Pulsed Ion Beam. 21st International Symposium on Heavy Ion Inertial Fusion. Book of Abstracts. http://nur.nu.edu.kz/handle/123456789/1802 ru_RU
dc.identifier.uri http://nur.nu.edu.kz/handle/123456789/1802
dc.description.abstract The surface peeling process induced by intense pulsed ion beam (IPIB) irradiation was studied. Single crystal silicon specimens were treated by IPIB with accelerating voltage of 350 kV current density of 130 A/cm2. It is observed that under smaller numbers of IPIB shots, the surface may undergo obvious melting and evaporation... ru_RU
dc.language.iso en ru_RU
dc.publisher 21st International Symposium on Heavy Ion Inertial Fusion. Autonomous Organization of Education “Nazarbayev University” ru_RU
dc.rights Attribution-NonCommercial-ShareAlike 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-sa/3.0/us/ *
dc.subject study of peeling of single crystal silicon ru_RU
dc.subject ion beam ru_RU
dc.subject Research Subject Categories::NATURAL SCIENCES::Physics::Elementary particle physics ru_RU
dc.title Study of Peeling of Single Crystal Silicon by Intense Pulsed Ion Beam ru_RU
dc.type Abstract ru_RU


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