Yakupov, Talgat A.; Utegulov, Zhandos N.; Demirkan, Taha; Karabacak, Tansel
(Materials Today: Proceedings, 2017-01-01)
Abstract In this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic properties ...