Allen, L. P.; Insepov, Z.; Fenner, D. B.; Santeufemio, C.; Brooks, W.; Jones, K. S.; Yamada, I.
(Journal of applied physics, 2002)
Atomic force microscopy ~AFM! and high-resolution transmission electron microscope ~HRTEM! cross section imaging of individual gas cluster ion impact craters on Si~100! and Si~111! substrate surfaces is examined. The ...
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